发明名称 SUBSTRATE, SEMICONDUCTOR DEVICE, AND SUBSTRATE MANUFACTURING METHOD
摘要 This substrate has a supporting layer, a columnar first bump, and a second bump. The supporting layer has a main surface. The first bump is filled with a first conductive metal, and has a first upper surface and a side surface. The second bump contains a plurality of fine particles of a second conductive metal, and covers the first upper surface and a part of the side surface. The first bump is disposed on the main surface, or the first bump is connected to an electrode disposed on the main surface. The second bump has a protruding second upper surface.
申请公布号 WO2016189692(A1) 申请公布日期 2016.12.01
申请号 WO2015JP65235 申请日期 2015.05.27
申请人 OLYMPUS CORPORATION 发明人 TAKEMOTO Yoshiaki
分类号 H01L21/60;H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/60
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