| 摘要 |
PROBLEM TO BE SOLVED: To provide a transport device for a glass substrate and a method of manufacturing a glass substrate, capable of restraining the occurrence of a defect in the glass substrate by transporting the glass substrate in a stably floating manner.SOLUTION: A glass substrate inspection device 100 includes: a substrate floating unit 20; and a substrate transporting unit 30. The substrate floating unit 20 has a plurality of float panels 22 disposed at spaces along the transport direction D1. The float panel 22 has a gas jet mechanism 22a and a substrate opposite surface 22b. The gas jet mechanism 22a jets gas sprayed to the surface of a glass substrate 10. The substrate opposite surface 22b is a surface opposite to the surface of the transported glass substrate 10 to which the gas is sprayed. The float panels 22 are disposed so that the heights of the substrate opposite surfaces 22b are gradually decreased as they go toward the transport direction D1. |
