| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enhance precision to reduce an error of a heating temperature caused by a change of a peripheral temperature, in a heater control circuit for controlling the heating temperature of the heater to be higher all the time by a fixed temperature than the peripheral temperature, using a bridge circuit. <P>SOLUTION: The bridge circuit is constituted by connecting the first branch including an impurity doped resistance thermometer sensor 52 and a fixed resistance 63, and the second branch including an impurity doped heating element 36 and a fixed resistance 64 other than the fixed resistance 63, in parallel. This heating device for a sensor of the present invention includes the bridge circuit, and a means for controlling a temperature difference between the resistance thermometer sensor and the heating element, by regulating a voltage impressed to the bridge circuit or a current supplied to the bridge circuit, based on a potential difference between the midpoint of the first branch and the midpoint of the second branch, and a doping amount of the resistance thermometer sensor is more than a doping amount of the heating element. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
