| 发明名称 |
Laminate Structure And Manufacturing Method Thereof |
| 摘要 |
A laminate structure having an indium target with the occurrence of defects being well controlled and excellent in adhesion between the indium target and a backing tube is provided. A laminate structure of an indium target and a backing tube wherein a defect area ratio at an indium-backing tube interface is 5.0% or less. |
| 申请公布号 |
US2016289818(A1) |
申请公布日期 |
2016.10.06 |
| 申请号 |
US201615047072 |
申请日期 |
2016.02.18 |
| 申请人 |
JX Nippon Mining & Metals Corporation |
发明人 |
Endo Yousuke;Yamamoto Hiroyoshi |
| 分类号 |
C23C14/34;B22D19/00 |
主分类号 |
C23C14/34 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laminate structure of a cylindrical indium target and a backing tube, wherein a defect area ratio at an indium-backing tube interface is 5.0% or less. |
| 地址 |
Tokyo JP |
