发明名称 |
FLEXIBLE ELECTROSTATIC ACTUATOR |
摘要 |
<p>An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end connected to the base and a free end opposite the fixed end and spaced apart from the base. The second electrode has at least first and second portions separated by a third portion and in combination defining a first and second step provided in a vicinity of the fixed end.</p> |
申请公布号 |
EP1738217(A2) |
申请公布日期 |
2007.01.03 |
申请号 |
EP20050738825 |
申请日期 |
2005.04.25 |
申请人 |
RESEARCH TRIANGLE INSTITUTE |
发明人 |
DAUSCH, DAVID;GOODWIN, SCOTT, H |
分类号 |
G02F1/03;F16K99/00;G02B26/00;G02B26/08;G02F1/01;H01G5/01;H01H57/00;H01H59/00;H01L29/84;H05F3/00 |
主分类号 |
G02F1/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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