| 发明名称 |
METHODS AND APPARATUS FOR NODULE CONTROL IN A TITANIUM-TUNGSTEN TARGET |
| 摘要 |
Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder. |
| 申请公布号 |
US2016189941(A1) |
申请公布日期 |
2016.06.30 |
| 申请号 |
US201414587967 |
申请日期 |
2014.12.31 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
Wei Junqi;Cao Zhitao;Ow Yueh Sheng;Jupudi Ananthkrishna;Savandaiah Kirankumar;Wang Xin;Thirunavukarasu Sriskantharajah |
| 分类号 |
H01J37/34;H01J37/32;B22F3/12 |
主分类号 |
H01J37/34 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A target, comprising:
a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder. |
| 地址 |
Santa Clara CA US |
