发明名称 Semiconductor device with thin-film resistor
摘要 A semiconductor device with a metal-containing layer, a first semiconductor layer, that is formed on top of the metal-containing layer, and a resistor that is formed in the metal-containing layer and that is contacted through the first semiconductor layer is provided. Furthermore, a method of manufacturing a semiconductor device is provided, wherein the method comprises manufacturing of a resistor with the following steps: formation of a metal-containing layer over a wafer, particularly a SOI wafer, formation of a first semiconductor layer on top of the metal-containing layer and formation of a contact through the semiconductor layer to the metal-containing layer.
申请公布号 US2016300856(A1) 申请公布日期 2016.10.13
申请号 US201514982112 申请日期 2015.12.29
申请人 GLOBALFOUNDRIES Inc. 发明人 Moll Hans-Peter;Sidelnicov Andrei;Wiatr Maciej
分类号 H01L27/12;H01L29/786;H01L23/538;H01L21/8258;H01L21/768;H01L21/762;H01L29/66;H01L49/02;H01L29/06 主分类号 H01L27/12
代理机构 代理人
主权项
地址 Grand Cayman KY
您可能感兴趣的专利