| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional sensor capable of reducing uncertainty of measurement, improving measurement accuracy relative to the attitude and the displacement of a measuring object, and performing high-speed response. SOLUTION: This sensor includes the first PBS 3 for splitting light from a light source 2 into two portions, irradiating one portion to a reference mirror 10 as reference light c1, and irradiating the other portion to the measuring object 9 as measuring light c2; the second PBS 4 for splitting the reference light c1 reflected by the reference mirror 10 and the measuring light c2 reflected by the measuring object 9 into each two portions, and allows them to interfere with each other; the first optical system 5 for guiding one interference light c5 onto a prescribed measuring straight line 14; the second optical system 6 for rotating the other interference light c6 by 90 degrees on a plane using an optical axis as a normal, and guiding it onto the measuring straight line 14; and a line image sensor 8 for receiving each interference light c5, c6 on the measuring straight line 14. COPYRIGHT: (C)2008,JPO&INPIT
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