发明名称 |
Composition for resist patterning and method of manufacturing optical structures using imprint lithography |
摘要 |
Provided is a composition for resist patterning comprising a thiol; at least one -ene monomer; at least one polymerization initiator; and, optionally, a metal oxide used in an amount of 0.1 to 50 wt. % per weight of the composition; the thiol and -ene monomer are used in a stoichiometric ratio with a refractive index between 1.6 and 1.8. The composition is used in a patterning process wherein the composition is dispensed to the substrate, is covered with a mask, and is cured, e.g., by UV radiation, at room temperature with light having a wavelength in the range of 200 nm to 450 nm. The process may be carried out with thermal annealing. |
申请公布号 |
US9298089(B1) |
申请公布日期 |
2016.03.29 |
申请号 |
US201414340539 |
申请日期 |
2014.07.24 |
申请人 |
Abeam Technologies, Inc. |
发明人 |
Hernandez Carlos Pina;Peroz Christophe;Cabrini Stefano |
分类号 |
G03F7/027;G03F7/028;G03F7/20;C08L25/00 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
1. A nanoimprint lithography (NIL) ink comprising:
a thiol; an ene monomer; and a polymerization initiator, wherein the NIL ink has a refractive index between 1.6 and 1.95 and a transmittance per micron thickness between 80% and 99%. |
地址 |
Castro Valley CA US |