| 摘要 |
The present invention relates a current measuring sensor with high accuracy for an RF power source. Disclosed is a current measuring sensor which includes: a signal transmission part for transmitting a power signal; a probe for measuring a current which is separated from a lateral surface of the signal transmission part and has a loop structure to divide a region intersecting with a magnetic field induced according to the power signal flowing along the signal transmission part; and a signal processing part which measures an induced current in the probe for measuring a current due to the magnetic field induced according to power signal flowing along the signal transmission part, and calculates the current value of the power signal flowing along the signal transmission part from the measured induced current value. |
