| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device capable of detecting the abrasion loss of a blade accurately, and to provide a dicing method by the dicing device.SOLUTION: A invariable first distance a in the Z direction between the axis of rotation of a blade 28 and the tip 56A of a master member 56 is acquired. A second distance b in the Z direction between the axis of rotation of a blade 28 and the tip at the outer peripheral end of the blade 28 is acquired. A varying third distance c in the Z direction between the axis of rotation of a blade 28 and the tip 56A of a master member 56 is acquired. An abrasion loss operation unit 74 corrects the second distance b based on the variation of the third distance c for a reference value, i.e., the first distance a, thereby removing the error component caused by temperature change. The abrasion loss operation unit 74 subtracts the corrected second distance b from the known value of initial radius of the blade.SELECTED DRAWING: Figure 4 |
