| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor where an acceleration sensor chip cannot be affected easily by stress due to factors other than acceleration as compared with before, and precision in the gap length between a stopper and the weight section of the acceleration sensor chip can be improved and the acceleration sensor chip can be miniaturized as compared with before. <P>SOLUTION: The acceleration sensor comprises the acceleration sensor chip 1, a package 3 to which a frame section 11 in the acceleration sensor chip 1 is stuck, and a flat stopper 2 for regulating the excessive displacement of a weight section 12 in the acceleration sensor chip 1. A projecting section 7 coming into contact with the stopper 2 so that the distance between a core section 12a of the weight section 12 and the stopper 2 can be maintained at a prescribed gap length projects on a surface that opposes the stopper 2 at the frame section 11 of the acceleration sensor chip 1, and both the end sections of the stopper 2 are stuck to the tip surface of a projecting base part 3b projecting to a prescribed height that is lower than a set height from the fixed surface 3a of the acceleration sensor chip 1 in the package 3 to the stopper 2 by an adhesive. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
