METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATION CHIP, PIEZOELECTRIC VIBRATION CHIP AND PIEZOELECTRIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibration chip by which the cross section of a vibration arm of the piezoelectric vibration chip (20) is formed in an exact rectangle shape.

SOLUTION: The method for manufacturing the piezoelectric vibration chip has: a step (S112) of preparing a flat piezoelectric material having etching anisotropy; a step (S112) of forming corrosion-resisting films on both sides of the piezoelectric material; a first application step (S114) of applying photoresist onto both sides of the corrosion-resisting films; a first exposure step (S116) of exposing a pattern of the piezoelectric vibration chip only on one side of the piezoelectric material; a step (S118) of developing the photoresist after the first exposure step to remove the corrosion-resisting film appearing only on one side; and a first etching step (S126) of etching the piezoelectric material appearing by removing the corrosion-resisting film.

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