| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for determining the processing conditions of a coating film not causing exfoliation under conditions of liquid immersion exposure before the coating film is actually fed to an exposure machine. <P>SOLUTION: A test substrate is prepared which is equivalent to an actual substrate on which a predetermined film is formed and subjected to edge treatment under predetermined conditions (STEP 1), the test substrate is processed by a testing device simulating a liquid immersion exposure device under conditions corresponding to predetermined liquid immersion exposure conditions (STEP 2), state of the edge of the film on the substrate is inspected after processing by the testing device (STEP 3), and a decision is made whether the state of the edge of the substrate falls within an allowable range or not based on the inspection results (STEP 4). If the state of the edge deviates from the allowable range, processing, inspection and judgment are repeated under conditions corresponding to the liquid immersion exposure device while altering the edge treatment conditions until the state of the edge falls within the allowable range (STEP 7, 8, 2-4), and if the state of the edge falls within the allowable range, the edge treatment conditions are determined as the edge treatment conditions of the actual substrate (STEP 5). <P>COPYRIGHT: (C)2008,JPO&INPIT |
