PROCÉDÉ DE PRÉPARATION DE CÉRAMIQUES, CÉRAMIQUES AINSI OBTENUES ET LEURS UTILISATIONS NOTAMMENT COMME CIBLE POUR PULVÉRISATION CATHODIQUE

摘要

Process for preparing a ceramic from an inorganic base material that is in the form of a powder having a high melting point, comprising a step of mixing the powder of the inorganic base material with a second inorganic component also in powder form and which acts as a dopant for the inorganic base material. The dopant is constituted by a single inorganic material or by a mixture of at least two inorganic materials having a dopant effect on the inorganic base material. The process comprises a sintering step carried out at a high temperature. The ceramics obtained, because of their high density, are advantageously used as a target element. Films and electrodes obtained from these ceramics exhibit particularly advantageous properties.