| 摘要 |
PROBLEM TO BE SOLVED: To replace a function of one relatively large-sized MEMS device or digital variable capacitor using a number of small-sized MEMS devices.SOLUTION: A number of relatively small-sized MEMS devices execute the same function as the relatively large-sized device but can be encapsulated within a cavity using a CMOS compatible process because of their relatively small size. By averaging signals over a number of relatively small-sized devices, the precision of an array formed from a plurality of relatively small-sized devices is made equivalent with the relatively large-sized device. In a first process, an array formed from a plurality of MEMS-based accelerometer switches is used. In such a case, an analog/digital conversion of an inertial response is integrated with the array. In a second process, a MEMS-based device structure is used in which a plurality of MEMS devices are operated in parallel as digital variable capacitors.SELECTED DRAWING: Figure 17A |
