发明名称 METHOD OF USING AN ATOMIC FORCE MICROSCOPE AND MICROSCOPE
摘要 The invention relates to a method of using an atomic force microscope and to a microscope. The inventive method comprises the following steps consisting in at least performing bimodal excitation of a microlever (M) which is disposed on a sample and analysing at least: the variation in the oscillation amplitude (A i ) of an output signal (A i cos(É i t-Æ i )) that is representative of the response from the microlever (M) to the excitation of one of the natural vibration modes thereof, in order to obtain topographic information in relation to the sample; and to the variation in the phase (Æ j ) of an output signal (A j cos(É j t-Æ j )) that is representative of the response from the microlever (M) to the excitation of another natural vibration mode thereof, in order to obtain compositional information in relation to the sample. The inventive microscope is adapted to be used with the aforementioned method.
申请公布号 EP1912055(A1) 申请公布日期 2008.04.16
申请号 EP20060830902 申请日期 2006.02.21
申请人 CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS 发明人 GARCIA GARCIA, RICARDO;RODRIGUEZ FRUTOS, TOMAS, RAUL
分类号 G01Q60/24;G01Q60/34;B82Y35/00;G01Q30/04;G01Q60/32 主分类号 G01Q60/24
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