Conforming Fence For Vacuum Support Machining Operations

摘要

A process for slicing a row from an array of devices includes positioning an array such that a row physically interfaces with a conforming fence, applying a force to the fence to conform it to the mating face of the row, applying a vacuum force to the fence to secure it in conformal position with the row, and then slicing the row from the array. Applying the force to the fence to conform it to the row inhibits leakage associated with the vacuum force utilized to secure the fence with the row. A stronger hold of the row is provided, which can lead to more precise slicing of the row. A slicing tool includes a rotatable support that, in operation, is supported by an air bearing and hence is able to freely rotate to a position such that the fence conforms to a workpiece face.

主权项

1. A method for slicing a row from an array of devices, the method comprising:
positioning said array of devices such that said row physically interfaces with a slicing tool conforming fence configured to conformally interface with a mating face of said row; applying a force to said conforming fence sufficient to substantially conform said conforming fence to said mating face of said row; applying a vacuum force to said conforming fence to secure said conforming fence in a conformal interfacing position with said row; and slicing said row from said array of devices.