发明名称 Electro-optic device and method of manufacturing an electro-optic device
摘要 <p>A wiring substrate includes a substrate, a first film, and a second film formed between the substrate and the first film, and an empty space is formed between at least a part of the second film and the substrate.</p>
申请公布号 EP1748491(A1) 申请公布日期 2007.01.31
申请号 EP20060015688 申请日期 2006.07.27
申请人 SEIKO EPSON CORPORATION 发明人 YUDASAKA, ICHIO
分类号 H01L27/32;H01L27/14 主分类号 H01L27/32
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