发明名称 ADAPTIVE PERIODIC WAVEFORM CONTROLLER
摘要 A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
申请公布号 WO2016089992(A1) 申请公布日期 2016.06.09
申请号 WO2015US63421 申请日期 2015.12.02
申请人 MKS INSTRUMENTS, INC. 发明人 FISK, II, LARRY J.;RADOMSKI, AARON T.;SMYKA, JONATHAN
分类号 H01J37/32 主分类号 H01J37/32
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