| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic thin film having a high resonant frequency and excellent high frequency characteristics. SOLUTION: An oblique growth magnetic layer 3 is formed on a substrate 2 through columnar epitaxial growth in the direction oblique to the surface of the substrate 2 (oblique growth magnetic body 4). In order to soft magnetizing the oblique growth magnetic body 4 in the oblique growth magnetic layer 3, the oblique growth magnetic body 4 is mixed with an insulator 5. Consequently, the oblique growth magnetic layer 3 exhibits in-plane crystal magnetic anisotropy and in-plane crystal magnetic anisotropy is intensified thus increasing anisotropic field Hk. Since the anisotropic field Hk can be varied only in the epitaxial growth direction of the oblique growth magnetic layer 3 without varying the composition of a magnetic thin film 1, the anisotropic field Hk can be increased without reducing saturation magnetization 4πMs and resonant frequency fr of the magnetic thin film 1 can be raised. Consequently, a magnetic thin film excellent in high frequency characteristics can be obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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