发明名称 METHOD AND APPARATUS FOR TRANSFERRING CHIP COMPONENTS
摘要 PROBLEM TO BE SOLVED: To provide a transfer method and apparatus in which a gluing starting position is automatically determined to start gluing when sequentially gluing chip components on a sheet on a wafer table, and the chip components can be efficiently glued within a gluing range. SOLUTION: A Y coordinate of the gluing starting position to first glue a chip component on a sheet 5 is determined from a radius R for the circular gluing range of the sheet 5 and a Y-direction dimension Y1 of chip components 55, an X coordinate of the gluing starting position to first glue the chip component 55 on the sheet 5 is determined based on an X-direction pitch L1, and chip components are sequentially glued and transferred onto the sheet from the gluing starting position. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007243083(A) 申请公布日期 2007.09.20
申请号 JP20060066933 申请日期 2006.03.13
申请人 HITACHI HIGH-TECH INSTRUMENTS CO LTD 发明人 FUKUDA MASAYUKI;MURAKAMI NAOYA
分类号 H01L21/67;H01L21/50 主分类号 H01L21/67
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