发明名称 |
CARRIER CONFINEMENT FOR HIGH MOBILITY CHANNEL DEVICES |
摘要 |
An embodiment includes a device comprising: a trench that includes a doped trench material having: (a)(i) a first bulk lattice constant and (a)(ii) at least one of a group III-V material and a group IV material; a fin structure, directly over the trench, including fin material having: (b)(ii) a second bulk lattice constant and (b)(ii) at least one of a group III-V material and a group IV material; a barrier layer, within the trench and directly contacting a bottom surface of the fin, including a barrier layer material having a third bulk lattice constant; wherein (a) the trench has an aspect ratio (depth to width) of at least 1.5:1, and (b) the barrier layer has a height not greater than a critical thickness for the barrier layer material. Other embodiments are described herein. |
申请公布号 |
WO2016099475(A1) |
申请公布日期 |
2016.06.23 |
申请号 |
WO2014US70792 |
申请日期 |
2014.12.17 |
申请人 |
INTEL CORPORATION |
发明人 |
DEWEY, GILBERT;METZ, MATTHEW V.;KAVALIEROS, JACK T.;RACHMADY, WILLY;GHANI, TAHIR;MURTHY, ANAND S.;MOHAPATRA, CHANDRA S.;KENNEL, HAROLD W.;GLASS, GLENN A. |
分类号 |
H01L29/78 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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