| 摘要 |
PROBLEM TO BE SOLVED: To provide a joint for a fluid control device capable of reducing a man-hour in expansion of line, an opening/closing valve for the fluid control device, and the fluid control device.SOLUTION: An outlet-side opening/closing valve supporting structure 10 in a fluid control device 1 includes an outlet-side opening/closing valve 7 disposed on an upper stage of each line, a joint 11 for single row disposed at a lower stage of each line, a joint for double row 12 disposed at the lower stage over the whole line, and a joint 21 for expansion of line disposed between the outlet-side opening/closing valve 7, and the joint 11 for single row and the joint 12 for double row. The joint 21 for expansion of line has an inlet passage 23 opened to a lower face at one end to communicate to an outlet passage 11b of the joint 11 for single row, and opened to an upper face at the other end to communicate to an inlet passage 7a of the outlet-side opening/closing valve 7, an outlet passage 24 opened to an upper face at one end to communicate to an outlet passage 7b of the outlet-side opening/closing valve 7, and opened to a lower face at the other end to communicate to a branch passage 12b of the joint 12 for double row, and a branch passage 25 branched from the outlet passage 24 and opened to the external.SELECTED DRAWING: Figure 2 |
