发明名称 HIGH HEAT-RESISTANT SOLDER BONDED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having high heat resistance and high reliability.SOLUTION: In a high heat-resistant solder bonded semiconductor device, a semiconductor element and a substrate are bonded with a solder that expresses super plasticity. The high heat-resistant solder bonded semiconductor device is characterized in that the solder is protruded to the outside from an end of the semiconductor element while the solder is kept in a semi-molten state to prevent the solder from flowing out and the solder is to be swelled to an upper side than a lower face of the semiconductor element, and then, the solder is allowed to express super plasticity, and stress strain at the interface between the solder and the semiconductor element and stress strain at the interface between the solder and the substrate are suppressed.SELECTED DRAWING: Figure 1
申请公布号 JP2016225552(A) 申请公布日期 2016.12.28
申请号 JP20150112726 申请日期 2015.06.03
申请人 IBARAKI UNIV 发明人 SUGAWARA YOSHITAKA;ONUKI HITOSHI;TAMAHASHI KUNIHIRO;CHIBA AKIO
分类号 H01L21/52;B23K35/28;C22C18/04;C22C21/00 主分类号 H01L21/52
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