FLUORO-BASED POLYMER COMPOSITE TARGET FOR SPUTTERING

摘要

The fluoro-based polymer composite target for sputtering according to the present invention is excellent in adhesion with a metal electrode to which a voltage is applied, can prevent bending, and is capable of stably forming plasma by imparting conductivity even with industrially widely used DC and MF power supply systems, thereby allowing a fluoro-based polymer to be effectively deposited on an adherend by sputtering.