发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of preventing storage of electric charges in a semiconductor layer.SOLUTION: A semiconductor device comprises: a semiconductor layer that has an element formation region comprising a semiconductor element, and an element isolation region contacted with the element formation region in a plan view, comprising a first opening, and consisting of a first insulation member; a second insulation member formed so that its first surface is contacted with a principal surface of the semiconductor layer, and that comprises a second opening communicated with the first opening, and a third opening provided at a different position from the second opening; a third insulation member that comprises a second surface contacted with a rear face of the semiconductor layer opposed to the principal surface of the semiconductor layer, and a third surface opposed to the second surface, and that has a fourth opening communicated with the first opening; and a second conductive member connected with a first conductive member having a thickness smaller than a distance between the principal surface of the semiconductor layer and the third surface, and formed in the first opening, the second opening, and the fourth opening that have a continuous side wall.SELECTED DRAWING: Figure 7
申请公布号 JP2016197759(A) 申请公布日期 2016.11.24
申请号 JP20160164747 申请日期 2016.08.25
申请人 LAPIS SEMICONDUCTOR CO LTD 发明人 KUSANO KENICHIRO
分类号 H01L21/3205;H01L21/336;H01L21/76;H01L21/762;H01L21/768;H01L23/52;H01L23/522;H01L27/12;H01L29/786 主分类号 H01L21/3205
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