LASER MACHINING SYSTEMS AND METHODS

摘要

A laser machining method includes directing, from an F-theta lens having a long focal length of greater than about 250 millimeters, a laser beam at a non-perpendicular beam tilt angle from an optical axis of the lens having a top-hat profile and a narrow beam divergence angle of between about 1 degree and about 3 degrees towards a workpiece on a stage movable in at least an X-direction and a Y-direction, engaging the directed laser beam with the workpiece disposed in the usable field of view, moving the workpiece and the directed laser beam relative to each other, and removing portions of the workpiece with the directed laser beam to define a machined surface.

主权项

1. A method for laser machining a workpiece, the method comprising:
directing, from an F-theta lens having a long focal length of greater than about 250 millimeters, a laser beam at a non-perpendicular beam tilt angle from an optical axis of the lens having a top-hat profile and a narrow beam divergence angle of between about 1 degree and less than 3 degrees towards a workpiece disposed on a stage movable in at least an X-direction and a Y-direction; engaging the directed laser beam with the workpiece; moving the workpiece and the directed laser beam relative to each other; and removing portions of the workpiece with the directed laser beam to define a machined surface.