发明名称 MEMORY DEVICE
摘要 Various embodiments provide memory devices and methods for forming the same. A substrate is provided, the substrate having one or more adjacent memory cells formed thereon. Each memory cell includes a gate structure, a control gate layer, and a first mask layer. A portion of the control gate layer is removed, to reduce a size of an exposed portion of the control gate layer in a direction parallel to a surface of the substrate. An electrical contact layer is formed on an exposed sidewall of the control gate layer and an exposed surface of the substrate. A barrier layer is formed on a sidewall of the memory cell. A conductive structure is formed on the substrate. The conductive structure has a significantly larger distance from control gate layer than from the gate structure, and the barrier layer forms an isolation layer between the conductive structure and the control gate layer.
申请公布号 US2016351579(A1) 申请公布日期 2016.12.01
申请号 US201615186664 申请日期 2016.06.20
申请人 Semiconductor Manufacturing International (Shanghai) Corporation 发明人 HONG ZHONGSHAN;YANG YUN
分类号 H01L27/115;H01L21/311;H01L21/3213;H01L29/49;H01L29/423;H01L29/66;H01L29/788;H01L21/28;H01L21/768 主分类号 H01L27/115
代理机构 代理人
主权项
地址 Shanghai CN