发明名称 |
LOST MOTION GASKET FOR SEMICONDUCTOR TEST, AND ASSOCIATED SYSTEMS AND METHODS |
摘要 |
Systems and methods for testing semiconductor wafers using a wafer translator are disclosed herein. In one embodiment, an apparatus for testing semiconductor dies includes a semiconductor wafer translator having a wafer-side positioned to face toward a device under test, and an inquiry-side facing away from the wafer-side. The apparatus also includes a flexible arm peripherally connected to the wafer translator, and an evacuation opening within the flexible arm or within the wafer translator. The evacuation opening is open to a flow of a gas in a first position of the flexible arm, and closed to a flow of the gas in a second position of the flexible arm. |
申请公布号 |
WO2016200630(A1) |
申请公布日期 |
2016.12.15 |
申请号 |
WO2016US34669 |
申请日期 |
2016.05.27 |
申请人 |
TRANSLARITY, INC. |
发明人 |
PRESTON, Douglas A.;LANE, Christopher T.;GARDINER, Mark;JOHNSON, Morgan T.;BUCK, Douglas;KALNIN, Nikolai |
分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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