METHOD OF CALIBRATING SURFACE SHAPE MEASUREMENT INSTRUMENT, AND SURFACE SHAPE MEASUREMENT INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of calibrating a surface shape measurement instrument which accurately and simply obtains a moving distance of a scanning member in the elevation direction in response to a change in a voltage applied to a piezoelectric element in comparison with a conventional method. SOLUTION: A relationship between the moving distance of a Z stage 11 measured by a laser holoscale 12 and a displacement of a cantilever 5 measured by a displacement detecting section 6 is obtained by moving the Z stage 11 toward a surface of a sample. A relationship between the change in the voltage applied to the piezoelectric element 7 and the displacement of the cantilever 5 measured by the displacement detecting section is obtained by changing the voltage applied to the piezoelectric element 7. The moving distance of the cantilever 5 in the elevation direction in response to the change in the voltage applied to the piezoelectric element is calculated by combining ratios obtained from two detection results. COPYRIGHT: (C)2008,JPO&INPIT