METHOD OF INSPECTING A SPECIMEN AND SYSTEM THEREOF

摘要

There are provided a method of inspecting the inspection area and an inspection system thereof. The inspection system comprises an inspection control unit operatively coupled to an inspection tool unit and to a recipe generating unit. The inspection control unit is configured to obtain the design data and the inspection recipe; to provide local segmentation of at least one inspection PoI comprised in an inspection image captured from the inspection area by the inspection tool unit, thereby obtaining inspection structural elements comprised in the at least one inspection PoI, the local segmentation is provided using segmentation configuration data specified in the inspection recipe; to identify one or more target structural elements and design structural elements corresponding thereto, identifying is provided using design association data specified in the inspection recipe; and to enable metrology measurements for the one or more target structural elements using the identified design structural elements.

主权项

1. A computerized method of inspecting an inspection area of a specimen, the inspection area comprising at least one inspection pattern of interest (PoI), the method comprising:
upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the PoI and an inspection recipe generated using the design data and a test image comprising at least one test PoI of substantially the same design as the at least one PoI, providing local segmentation of at least one inspection PoI comprised in an inspection image captured from the inspection area, thereby obtaining inspection structural elements comprised in the at least one inspection PoI, wherein the local segmentation is provided using segmentation configuration data specified in the inspection recipe and obtained resulting of global segmentation of the test image captured from the inspection area; identifying among the inspection structural elements in the at least one inspection PoI one or more inspection structural elements corresponding to at least one metrology target, to yield one or more target structural elements; identifying design structural elements corresponding to the one or more target structural elements, wherein identifying is provided using design association data specified in the inspection recipe and obtained resulting of associating segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI; and enabling metrology measurements for the one or more target structural elements using the identified design structural elements.