| 摘要 |
The method and device of the present invention for measuring the shape of a measurement object are configured so that a plurality of illuminating lights emitted from a plurality of light sources are radiated to a measurement object, an image of a region of the measurement object irradiated by the plurality of illuminating lights is taken by a color camera, the color image of an inspection object obtained by imaging by the color camera is separated into a plurality of images in accordance with wavelength, different image processing is performed for each of the separated plurality of images and a cross-sectional shape and a movement amount are calculated, and overall shape data are calculated from the movement amount and the cross-sectional shape calculated from the different images. |
