| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction apparatus capable of adsorbing a work furnished with various rigidity while restraining its deformation. SOLUTION: This suction apparatus 1 is furnished with a suction pad 2 to adsorb the work W by negative pressure, and an elastic member 20 as a work deformation preventing means 5 to be elastically deformed by following deformation of the work W to the side of a negative load chamber 4 by making contact with the work W of a thin plate to be sucked is arranged in the negative load chamber 4 surrounded by the suction pad 2. COPYRIGHT: (C)2006,JPO&NCIPI
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