发明名称 |
Inspection method and inspection apparatus |
摘要 |
Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
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申请公布号 |
US2004174177(A1) |
申请公布日期 |
2004.09.09 |
申请号 |
US20040802882 |
申请日期 |
2004.03.18 |
申请人 |
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发明人 |
IINO SHINJI;TAKEKOSHI KIYOSHI;SUGA TADATOMO;ITOH TOSHIHIRO;KATAOKA KENICHI |
分类号 |
G01R31/26;G01N27/30;G01R1/06;G01R1/067;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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