发明名称 Inspection method and inspection apparatus
摘要 Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
申请公布号 US2004174177(A1) 申请公布日期 2004.09.09
申请号 US20040802882 申请日期 2004.03.18
申请人 发明人 IINO SHINJI;TAKEKOSHI KIYOSHI;SUGA TADATOMO;ITOH TOSHIHIRO;KATAOKA KENICHI
分类号 G01R31/26;G01N27/30;G01R1/06;G01R1/067;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R31/26
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