发明名称 弾性表面波共振子、および弾性表面波発振器、ならびに電子機器
摘要 A surface acoustic wave resonator includes: an IDT which is disposed on a quartz substrate with Euler angles of (−1°≦̸&phgr;≦̸1°, 117°≦̸&thetas;≦̸142°, 42.79°≦̸|ψ|≦̸49.57°), which is made of Al or alloy including Al as a main component and which excites a surface acoustic wave in an upper mode of a stop band; and an inter-electrode-finger groove which is formed by recessing the quartz substrate between electrode fingers which form the IDT. Here, the following expression is satisfied: 0.01λ≦̸G  (1), where λ represents a wavelength of the surface acoustic wave and G represents a depth of the inter-electrode-finger groove. The depth G of the inter-electrode-finger groove and a line occupancy &eegr; of the IDT satisfy the following expression: - 2.5 × G λ + 0.675 ≦̸&eegr;≦̸ - 2.5 × G λ + 0.775 ( 5 ) and a number of pairs N of the electrode fingers in the IDT is in the range of the following expression: 160≦̸N≦̸220  (19).
申请公布号 JP5934464(B2) 申请公布日期 2016.06.15
申请号 JP20100189862 申请日期 2010.08.26
申请人 セイコーエプソン株式会社 发明人 大脇 卓弥;飯澤 慶吾;山中 國人
分类号 H03H9/145 主分类号 H03H9/145
代理机构 代理人
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