发明名称 半導体装置およびその製造方法
摘要 PROBLEM TO BE SOLVED: To provide a technology of enabling improvement of performance of a semiconductor device.SOLUTION: A thin film transistor 10 includes a wire member 12 supported on a support substrate 11. The wire member 12 has as a core, a conductor wire 20 which functions as a gate line, and a surface of the conductor wire 20 is sequentially covered with a gate insulation film 21 and a channel layer 22. The wire member 12 is supported in a sandwiched manner by source/drain electrodes 13, 14 formed on the support substrate 11. The source/drain electrodes 13, 14 are electrically connected with the channel layer 22 at positions away from each other along a circumferential direction of a cross section of the wire member 12.
申请公布号 JP5936937(B2) 申请公布日期 2016.06.22
申请号 JP20120151027 申请日期 2012.07.05
申请人 株式会社日立製作所 发明人 内山 博幸;若菜 裕紀
分类号 H01L29/786;H01L29/423;H01L29/49 主分类号 H01L29/786
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