| 发明名称 |
Compact Thermal Reactor for Rapid Growth of High Quality Carbon Nanotubes (CNTs) Produced by Chemical Process with Low Power Consumption |
| 摘要 |
The invention relates to a compact thermal reactor for rapid growth of high quality carbon nanotubes (CNT2) produced by chemical process with low power consumption comprising: a processing chamber having a vacuum vessel, the vacuum vessel having a side cover formed of a first side wall and a second side wall, a top cover, a bottom cover connected to a support stand; feed through housing provided with a substrate; a heating system consisting of a heating element and back means; and at least one each inlet and outlet for gas injection into the process chamber for growing high quality carbon nanotubes over the substrate. |
| 申请公布号 |
US2016348235(A1) |
申请公布日期 |
2016.12.01 |
| 申请号 |
US201514721284 |
申请日期 |
2015.05.26 |
| 申请人 |
Department of Electronics and Information Technology (DEITY) ;Jamia Millia Islamia University |
发明人 |
Mishra Prabhash;Islam Saikh Saiful |
| 分类号 |
C23C16/26;C23C16/44;C23C16/455;C23C16/46 |
主分类号 |
C23C16/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A compact thermal reactor for rapid growth of high quality carbon nanotubes (CNTs) produced by a chemical process with low power consumption comprising:
a processing chamber having a vacuum vessel, the vacuum vessel having a side cover formed of a first side wall and a second side wall, a top cover, a bottom cover connected to a support stand; a feed through housing provided with a substrate; a heating system consisting of a heating element and back means; and at least one each inlet and outlet for gas injection into the process chamber for growing high quality carbon nanotubes over the substrate. |
| 地址 |
New Delhi IN |
