| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm vacuum gauge that suppresses the occurrence of a strain between a diaphragm and a cylindrical body, and to provide a manufacturing method of the diaphragm vacuum gauge.SOLUTION: The diaphragm vacuum gauge includes: a cylindrical body 11 that is made of ceramic and has an opening; a diaphragm 12 that includes a metal plate and closes the opening 11a of the cylindrical body 11; and a brazing filler metal 13 that mainly includes silver and copper, bonds the cylindrical body 11 and diaphragm 12 together, and has a melting point of 780°C or more. The metal constituting the metal plate indicates a linear expansion coefficient higher than that of the ceramic at the melting point of the brazing filler metal 13, and has a linear expansion coefficient lower than that of the ceramic in a temperature range lower than the melting point of the brazing filler metal 13.SELECTED DRAWING: Figure 1 |
