| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon carbide member capable of increasing strength and suppressing particle contamination.SOLUTION: A silicon carbide member 1 comprises a substrate made of a silicon carbide sintered body and a coating layer 3 on the substrate, in which an outermost surface layer 3a of the coating layer 3 is made of an O-Si-C layer. Further, the silicon carbide member 1 has a second layer 3b made of an O-Si layer as an underlay of the O-Si-C layer and a third layer 3c made of a Si-C-O layer as an underlay of the O-Si layer.EFFECT: The silicon carbide member 1 satisfying the condition of the above layer structure has high strength and little particle contamination, and accordingly, has a long service life and high reliability. The member can be suitably used as a member for a semiconductor or a liquid crystal device.SELECTED DRAWING: Figure 1 |
