MEMS DEVICE AND INTERCONNECTS FOR SAME

摘要

A microelectromechanical systems device having an electrical interconnect (202) connected to at least one of an electrode (16a) and a movable layer (14) within the device. At least a portion of the electrical interconnect (202) is formed from the same material as a movable layer (14) of the device. A thin film (64), particularly formed of molybdenum, is provided underneath the electrical interconnect (202). The movable layer (14) preferably comprises aluminum.