PLASMA REACTOR WITH INTERNAL TRANSFORMER

摘要

PURPOSE: A plasma reactor with an internal transformer is provided to prevent energy loss transmitted to plasma discharge space from a transformer by building the transformer in a plasma chamber. CONSTITUTION: A plasma chamber(400) includes a chamber body(410), a chamber cover(416) providing a plasma discharge space. The chamber body and the chamber cover are insulated by an O-ring as vacuum, and the plasma chamber includes a transformer. A gas inlet(412) is formed on a chamber cover, and a gas outlet(414) is formed on the bottom of the chamber body. Two bridge connection openings with which a connection bridge(423) of a core cylinder jacket(420) is combined are formed on the chamber cover. The core cylinder jacket includes a jacket body(421) and a jacket cover(422). The jacket body and jacket cover are electrically insulated by the O-ring and the isolation ring. The core cylinder jacket includes one or more than two connection bridges.