| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a long-life ultrasonic driver, where abrasion caused by electrification is difficult to occur, and a drive stage. <P>SOLUTION: An ultrasonic motor 1 is equipped with an oscillator 2 which generates oscillation in an ultrasonic range, and a drive chip 3 which is joined with this oscillator 2 and oscillates, accompanying the oscillation of the oscillator 2. A pair of guide rails 12 and 12 are installed in parallel on a base 11, and a stage 13 being a mobile body is attached onto these guide rails 12 and 12. A pillar-shaped member 14 is fixed, in parallel with the guide rail 12, to the topside of the base 11, and the flank, parallel with the guide rail 12, of this pillar-shaped member 14 is covered with a plate-shaped driving force generating member 15 constituted of conductive or semiconductive ceramics. Then, an ultrasonic motor 1 is fixed to the underside of the stage 13 so that the drive chip 3 may contact with the driving force generating member 15. <P>COPYRIGHT: (C)2007,JPO&INPIT |
