Ferro-electric memory device and method of manufacturing the same

摘要

A ferro-electric memory device includes a semiconductor substrate, a first transistor formed on the semiconductor substrate, and a first ferro-electric capacitor electrically connected to the first transistor and formed of a first capacitor material layer having a first lower electrode, a first ferro- electric film, and a first upper electrode, the first ferro-electric capacitor being thicker at its central portion than at its ends.