| 摘要 |
<p>Disclosed are methods and systems for testing MEMS devices (e.g., interferometric modulators (102)) so as to induce a moveable element (110) to move from a first position to a second position and to detect the movement. The methods include applying an electrical current (116) to the movable element (110) in the presence of a magnetic field (118), thereby producing a Lorentz force on the movable element (110). The force required to move the movable element (110) from the first position to the second position can then be estimated based on the magnitudes and geometric relationships of the electrical current (116) and the magnetic field (118), and the geometry of the movable element (110). In some embodiments, the first position may be a movable element (110) adhered to another surface (e.g., a layer on a substrate (112)) due to stiction forces. In these embodiments, the stiction forces can be estimated. In other embodiments, the first position may be a relaxed position, where the movable element (110) is spaced a first distance from a substrate (112), and the second position may be a second distance from the substrate (112) and/or contacting the substrate (112). In these embodiments, the springiness (e.g., a spring constant) of support structures supporting the movable element (112) can be estimated.</p> |
