| 摘要 |
The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement. |
