发明名称 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法
摘要 PROBLEM TO BE SOLVED: To provide a sputtering target for magnetic recording medium film formation capable of suppressing generation of particles as well as forming a film with a low ordering temperature, and also provide a method of manufacturing the same.SOLUTION: A sputtering target for magnetic recording medium film formation comprises a sintered body having a composition represented by the general formula:{(FePt)In}C, where 30≤x≤80, 1≤y≤20 and 3≤z≤65 with atom ratios. A method of manufacturing the sputtering target includes a step of hot pressing of a mixed powder of an InPt alloy powder, a FePt alloy powder, a Pt powder, and a graphite powder or carbon black powder, in a vacuum or inert gas atmosphere.
申请公布号 JP6037206(B2) 申请公布日期 2016.12.07
申请号 JP20120142833 申请日期 2012.06.26
申请人 三菱マテリアル株式会社 发明人 石山 宏一
分类号 G11B5/851;C23C14/34;G11B5/64;G11B5/65 主分类号 G11B5/851
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