VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY

摘要

A sensor structure and a method for operating a vibrating sensor of angular velocity comprising a rotor mass and two linearly moving masses is disclosed. The sensor structure and method comprises a rotor mass, two linearly moving masses, and two T-shaped levers each coupled with the two linearly moving masses and to the rotor mass. The T-shaped levers enable the rotor mass and the two linearly moving masses to be excited into an anti-phase primary mode, where the direction of angular momentum of the rotor mass is opposite to the direction of angular momenta of the linearly moving masses. Angular momenta of the rotor mass and the linearly moving masses cancel each other to a high extent, so that the total sum of angular momentum of the structure is very small. Nominal frequency of the anti-phase primary mode is distinctively low as compared to nominal frequencies of other possible primary modes, such as a parallel phase primary mode.

主权项

1. A structure for a vibrating sensor of angular velocity, said structure comprising:
at least one rotor mass; two linearly moving masses; two T-shaped levers each coupled to the two linearly moving masses and to the rotor mass by flexible springs, wherein the T-shaped levers enable the rotor mass and the two linearly moving masses to be excited into an anti-phase primary mode, wherein a direction of angular momentum of the rotor mass with respect to a geometrical center of the structure is opposite to a direction of angular momenta of the linearly moving masses.