LASER PROCESSING DEVICE

摘要

A laser processing device including: a laser oscillator; a processing table; a transmission optical system for transmitting laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to an object to be processed; a moving mechanism for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed; and a variable curvature spherical mirror. The transmission optical system includes a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator. The reflective beam expander mechanism includes a spherical mirror and a concave mirror having different curvatures in two orthogonal axes.

主权项

1. A laser processing device, comprising:
a laser oscillator for emitting laser light; a processing table on which an object to be processed is placed; a transmission optical system for transmitting the laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to the object to be processed; and moving means for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed, wherein the transmission optical system comprises a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator, and wherein the reflective beam expander mechanism comprises a mirror having different curvatures in two orthogonal axes.