| 摘要 |
PROBLEM TO BE SOLVED: To uniformly heat a material to be irradiated of a large area with an electron beam spot in an electron source apparatus to expand an irradiation area in a crucible by a scan coil when irradiating the material to be irradiated with electron beams. SOLUTION: The electron source apparatus comprises a magnet which turns electron beams emitted from an electron source and accelerated by the magnetic field by≥180°, and irradiates a material to be irradiated with the electron beams substantially in the perpendicular direction, a deflecting coil to generate the scanning magnetic field to scan the position at which the electron beam spot irradiates the material substantially from the perpendicular direction within a predetermined area, and a scan coil cover to surround at least a side of the deflecting coil facing the electron beams by a material which is as large in resistance as possible, not charged and small in eddy current losses. COPYRIGHT: (C)2005,JPO&NCIPI
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